7/26/2012	12:15:46 AM	Helium valve closed
7/26/2012	12:15:46 AM	H2 valve closed
7/26/2012	12:15:46 AM	BCl3 valve closed
7/26/2012	12:15:46 AM	PH3 valve closed
7/26/2012	12:15:46 AM	SiCl4 pre valve closed
7/26/2012	12:15:46 AM	SiCl4 post valve closed
7/26/2012	12:15:46 AM	Main Vac valve closed
7/26/2012	12:15:46 AM	Bypass valve closed
7/26/2012	12:15:46 AM	Bubbler valve closed
7/26/2012	12:15:46 AM	Helium MFC set to  0.000000
7/26/2012	12:15:46 AM	H2 MFC set to  0.000000
7/26/2012	12:15:46 AM	BCl3 MFC set to  0.000000
7/26/2012	12:15:46 AM	PH3 MFC set to  0.000000
7/26/2012	12:15:46 AM	SiCl4 MFC set to  0.000000
7/26/2012	12:15:46 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	12:15:46 AM	Tube furnace set to 0
7/26/2012	12:15:49 AM	Helium valve closed
7/26/2012	12:15:49 AM	BCl3 valve closed
7/26/2012	12:15:49 AM	PH3 valve closed
7/26/2012	12:15:49 AM	SiCl4 pre valve closed
7/26/2012	12:15:49 AM	SiCl4 post valve closed
7/26/2012	12:15:49 AM	Main Vac valve closed
7/26/2012	12:15:49 AM	Bypass valve closed
7/26/2012	12:15:49 AM	Bubbler valve closed
7/26/2012	12:15:49 AM	H2 valve opened
7/26/2012	12:15:49 AM	Helium MFC set to  0.000000
7/26/2012	12:15:49 AM	H2 MFC set to  500.000000
7/26/2012	12:15:49 AM	BCl3 MFC set to  0.000000
7/26/2012	12:15:49 AM	PH3 MFC set to  0.000000
7/26/2012	12:15:49 AM	SiCl4 MFC set to  0.000000
7/26/2012	12:15:49 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	12:15:49 AM	Tube furnace set to 0
7/26/2012	12:17:05 AM	Helium valve closed
7/26/2012	12:17:05 AM	BCl3 valve closed
7/26/2012	12:17:05 AM	PH3 valve closed
7/26/2012	12:17:05 AM	SiCl4 pre valve closed
7/26/2012	12:17:05 AM	SiCl4 post valve closed
7/26/2012	12:17:05 AM	Main Vac valve closed
7/26/2012	12:17:05 AM	Bypass valve closed
7/26/2012	12:17:05 AM	H2 valve opened
7/26/2012	12:17:05 AM	Bubbler valve opened
7/26/2012	12:17:05 AM	Helium MFC set to  0.000000
7/26/2012	12:17:05 AM	H2 MFC set to  500.000000
7/26/2012	12:17:05 AM	BCl3 MFC set to  0.000000
7/26/2012	12:17:05 AM	PH3 MFC set to  0.000000
7/26/2012	12:17:05 AM	SiCl4 MFC set to  0.000000
7/26/2012	12:17:05 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	12:17:05 AM	Tube furnace set to 0
7/26/2012	12:17:06 AM	Helium valve closed
7/26/2012	12:17:06 AM	BCl3 valve closed
7/26/2012	12:17:06 AM	PH3 valve closed
7/26/2012	12:17:06 AM	SiCl4 pre valve closed
7/26/2012	12:17:06 AM	SiCl4 post valve closed
7/26/2012	12:17:06 AM	Main Vac valve closed
7/26/2012	12:17:06 AM	Bypass valve closed
7/26/2012	12:17:06 AM	H2 valve opened
7/26/2012	12:17:06 AM	Bubbler valve opened
7/26/2012	12:17:06 AM	Helium MFC set to  0.000000
7/26/2012	12:17:06 AM	H2 MFC set to  500.000000
7/26/2012	12:17:06 AM	BCl3 MFC set to  0.000000
7/26/2012	12:17:06 AM	PH3 MFC set to  0.000000
7/26/2012	12:17:06 AM	SiCl4 MFC set to  0.000000
7/26/2012	12:17:06 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	12:17:06 AM	Tube furnace set to 1000
7/26/2012	12:42:06 AM	Helium valve closed
7/26/2012	12:42:06 AM	PH3 valve closed
7/26/2012	12:42:06 AM	Main Vac valve closed
7/26/2012	12:42:06 AM	Bypass valve closed
7/26/2012	12:42:06 AM	H2 valve opened
7/26/2012	12:42:06 AM	BCl3 valve opened
7/26/2012	12:42:06 AM	SiCl4 pre valve opened
7/26/2012	12:42:06 AM	SiCl4 post valve opened
7/26/2012	12:42:06 AM	Bubbler valve opened
7/26/2012	12:42:06 AM	Helium MFC set to  0.000000
7/26/2012	12:42:06 AM	H2 MFC set to  450.000000
7/26/2012	12:42:06 AM	BCl3 MFC set to  1.000000
7/26/2012	12:42:06 AM	PH3 MFC set to  0.000000
7/26/2012	12:42:06 AM	SiCl4 MFC set to  50.000000
7/26/2012	12:42:06 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	12:42:06 AM	Tube furnace set to 1000
7/26/2012	1:14:36 AM	Helium valve closed
7/26/2012	1:14:36 AM	BCl3 valve closed
7/26/2012	1:14:36 AM	Main Vac valve closed
7/26/2012	1:14:36 AM	Bypass valve closed
7/26/2012	1:14:37 AM	H2 valve opened
7/26/2012	1:14:37 AM	PH3 valve opened
7/26/2012	1:14:37 AM	SiCl4 pre valve opened
7/26/2012	1:14:37 AM	SiCl4 post valve opened
7/26/2012	1:14:37 AM	Bubbler valve opened
7/26/2012	1:14:37 AM	Helium MFC set to  0.000000
7/26/2012	1:14:37 AM	H2 MFC set to  430.000000
7/26/2012	1:14:37 AM	BCl3 MFC set to  0.000000
7/26/2012	1:14:37 AM	PH3 MFC set to  20.000000
7/26/2012	1:14:37 AM	SiCl4 MFC set to  50.000000
7/26/2012	1:14:37 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:14:37 AM	Tube furnace set to 1000
7/26/2012	1:16:07 AM	Helium valve closed
7/26/2012	1:16:07 AM	BCl3 valve closed
7/26/2012	1:16:07 AM	PH3 valve closed
7/26/2012	1:16:07 AM	SiCl4 pre valve closed
7/26/2012	1:16:07 AM	SiCl4 post valve closed
7/26/2012	1:16:07 AM	Main Vac valve closed
7/26/2012	1:16:07 AM	Bypass valve closed
7/26/2012	1:16:07 AM	H2 valve opened
7/26/2012	1:16:07 AM	Bubbler valve opened
7/26/2012	1:16:07 AM	Helium MFC set to  0.000000
7/26/2012	1:16:07 AM	H2 MFC set to  500.000000
7/26/2012	1:16:07 AM	BCl3 MFC set to  0.000000
7/26/2012	1:16:07 AM	PH3 MFC set to  0.000000
7/26/2012	1:16:07 AM	SiCl4 MFC set to  0.000000
7/26/2012	1:16:07 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:16:07 AM	Tube furnace set to 750
7/26/2012	1:31:07 AM	H2 valve closed
7/26/2012	1:31:07 AM	BCl3 valve closed
7/26/2012	1:31:07 AM	PH3 valve closed
7/26/2012	1:31:07 AM	SiCl4 pre valve closed
7/26/2012	1:31:07 AM	SiCl4 post valve closed
7/26/2012	1:31:07 AM	Main Vac valve closed
7/26/2012	1:31:07 AM	Bypass valve closed
7/26/2012	1:31:07 AM	Helium valve opened
7/26/2012	1:31:07 AM	Bubbler valve opened
7/26/2012	1:31:07 AM	Helium MFC set to  500.000000
7/26/2012	1:31:07 AM	H2 MFC set to  0.000000
7/26/2012	1:31:07 AM	BCl3 MFC set to  0.000000
7/26/2012	1:31:07 AM	PH3 MFC set to  0.000000
7/26/2012	1:31:07 AM	SiCl4 MFC set to  0.000000
7/26/2012	1:31:07 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:31:07 AM	Tube furnace set to 0
7/26/2012	1:51:07 AM	Helium valve closed
7/26/2012	1:51:07 AM	H2 valve closed
7/26/2012	1:51:07 AM	BCl3 valve closed
7/26/2012	1:51:07 AM	PH3 valve closed
7/26/2012	1:51:07 AM	SiCl4 pre valve closed
7/26/2012	1:51:07 AM	SiCl4 post valve closed
7/26/2012	1:51:07 AM	Main Vac valve closed
7/26/2012	1:51:07 AM	Bypass valve closed
7/26/2012	1:51:07 AM	Bubbler valve closed
7/26/2012	1:51:07 AM	Helium MFC set to  0.000000
7/26/2012	1:51:07 AM	H2 MFC set to  0.000000
7/26/2012	1:51:07 AM	BCl3 MFC set to  0.000000
7/26/2012	1:51:07 AM	PH3 MFC set to  0.000000
7/26/2012	1:51:07 AM	SiCl4 MFC set to  0.000000
7/26/2012	1:51:07 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:51:07 AM	Tube furnace set to 0
7/26/2012	2:11:07 AM	Helium valve closed
7/26/2012	2:11:07 AM	H2 valve closed
7/26/2012	2:11:07 AM	BCl3 valve closed
7/26/2012	2:11:07 AM	PH3 valve closed
7/26/2012	2:11:07 AM	SiCl4 pre valve closed
7/26/2012	2:11:07 AM	SiCl4 post valve closed
7/26/2012	2:11:07 AM	Main Vac valve closed
7/26/2012	2:11:07 AM	Bubbler valve closed
7/26/2012	2:11:07 AM	Bypass valve opened
7/26/2012	2:11:07 AM	Helium MFC set to  0.000000
7/26/2012	2:11:07 AM	H2 MFC set to  0.000000
7/26/2012	2:11:07 AM	BCl3 MFC set to  0.000000
7/26/2012	2:11:07 AM	PH3 MFC set to  0.000000
7/26/2012	2:11:07 AM	SiCl4 MFC set to  0.000000
7/26/2012	2:11:07 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	2:11:08 AM	Tube furnace set to 0
7/26/2012	2:12:02 AM	Helium valve closed
7/26/2012	2:12:02 AM	H2 valve closed
7/26/2012	2:12:02 AM	BCl3 valve closed
7/26/2012	2:12:02 AM	PH3 valve closed
7/26/2012	2:12:02 AM	SiCl4 pre valve closed
7/26/2012	2:12:02 AM	SiCl4 post valve closed
7/26/2012	2:12:02 AM	Main Vac valve closed
7/26/2012	2:12:02 AM	Bubbler valve closed
7/26/2012	2:12:02 AM	Bypass valve opened
7/26/2012	2:12:02 AM	Helium MFC set to  0.000000
7/26/2012	2:12:02 AM	H2 MFC set to  0.000000
7/26/2012	2:12:02 AM	BCl3 MFC set to  0.000000
7/26/2012	2:12:02 AM	PH3 MFC set to  0.000000
7/26/2012	2:12:02 AM	SiCl4 MFC set to  0.000000
7/26/2012	2:12:02 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	2:12:02 AM	Tube furnace set to 0
7/26/2012	2:13:02 AM	Helium valve closed
7/26/2012	2:13:02 AM	H2 valve closed
7/26/2012	2:13:02 AM	BCl3 valve closed
7/26/2012	2:13:02 AM	PH3 valve closed
7/26/2012	2:13:02 AM	SiCl4 pre valve closed
7/26/2012	2:13:02 AM	SiCl4 post valve closed
7/26/2012	2:13:02 AM	Bypass valve closed
7/26/2012	2:13:02 AM	Bubbler valve closed
7/26/2012	2:13:02 AM	Main Vac valve opened
7/26/2012	2:13:02 AM	Helium MFC set to  0.000000
7/26/2012	2:13:02 AM	H2 MFC set to  0.000000
7/26/2012	2:13:02 AM	BCl3 MFC set to  0.000000
7/26/2012	2:13:02 AM	PH3 MFC set to  0.000000
7/26/2012	2:13:02 AM	SiCl4 MFC set to  0.000000
7/26/2012	2:13:02 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	2:13:02 AM	Tube furnace set to 0
7/26/2012	3:13:02 AM	Run finished at 3:13 AM
7/26/2012	6:17:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2012	6:17:41 AM	Recipe started at 6:17 AM
7/26/2012	6:17:41 AM	Helium valve closed
7/26/2012	6:17:41 AM	H2 valve closed
7/26/2012	6:17:41 AM	BCl3 valve closed
7/26/2012	6:17:41 AM	PH3 valve closed
7/26/2012	6:17:41 AM	SiCl4 pre valve closed
7/26/2012	6:17:41 AM	SiCl4 post valve closed
7/26/2012	6:17:41 AM	Main Vac valve closed
7/26/2012	6:17:41 AM	Bypass valve closed
7/26/2012	6:17:41 AM	Bubbler valve closed
7/26/2012	6:17:41 AM	Helium MFC set to  0.000000
7/26/2012	6:17:41 AM	H2 MFC set to  0.000000
7/26/2012	6:17:41 AM	BCl3 MFC set to  0.000000
7/26/2012	6:17:41 AM	PH3 MFC set to  0.000000
7/26/2012	6:17:41 AM	SiCl4 MFC set to  0.000000
7/26/2012	6:17:41 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	6:17:41 AM	Tube furnace set to 0
7/26/2012	6:17:44 AM	H2 valve closed
7/26/2012	6:17:44 AM	BCl3 valve closed
7/26/2012	6:17:44 AM	PH3 valve closed
7/26/2012	6:17:44 AM	SiCl4 pre valve closed
7/26/2012	6:17:44 AM	SiCl4 post valve closed
7/26/2012	6:17:44 AM	Main Vac valve closed
7/26/2012	6:17:44 AM	Bypass valve closed
7/26/2012	6:17:44 AM	Bubbler valve closed
7/26/2012	6:17:44 AM	Helium valve opened
7/26/2012	6:17:44 AM	Helium MFC set to  500.000000
7/26/2012	6:17:44 AM	H2 MFC set to  0.000000
7/26/2012	6:17:44 AM	BCl3 MFC set to  0.000000
7/26/2012	6:17:44 AM	PH3 MFC set to  0.000000
7/26/2012	6:17:44 AM	SiCl4 MFC set to  0.000000
7/26/2012	6:17:44 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	6:17:45 AM	Tube furnace set to 0
7/26/2012	6:18:56 AM	Helium valve closed
7/26/2012	6:18:56 AM	H2 valve closed
7/26/2012	6:18:56 AM	BCl3 valve closed
7/26/2012	6:18:57 AM	PH3 valve closed
7/26/2012	6:18:57 AM	SiCl4 pre valve closed
7/26/2012	6:18:57 AM	SiCl4 post valve closed
7/26/2012	6:18:57 AM	Main Vac valve closed
7/26/2012	6:18:57 AM	Bypass valve closed
7/26/2012	6:18:57 AM	Bubbler valve closed
7/26/2012	6:18:57 AM	Helium MFC set to  0.000000
7/26/2012	6:18:57 AM	H2 MFC set to  0.000000
7/26/2012	6:18:57 AM	BCl3 MFC set to  0.000000
7/26/2012	6:18:57 AM	PH3 MFC set to  0.000000
7/26/2012	6:18:57 AM	SiCl4 MFC set to  0.000000
7/26/2012	6:18:57 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	6:18:57 AM	Tube furnace set to 0
7/26/2012	6:18:58 AM	Run finished at 6:18 AM
7/26/2012	6:18:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2012	6:32:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2012	6:32:10 AM	Recipe started at 6:32 AM
7/26/2012	6:32:10 AM	Helium valve closed
7/26/2012	6:32:10 AM	H2 valve closed
7/26/2012	6:32:10 AM	BCl3 valve closed
7/26/2012	6:32:10 AM	PH3 valve closed
7/26/2012	6:32:10 AM	SiCl4 pre valve closed
7/26/2012	6:32:10 AM	SiCl4 post valve closed
7/26/2012	6:32:10 AM	Main Vac valve closed
7/26/2012	6:32:10 AM	Bubbler valve closed
7/26/2012	6:32:10 AM	Bypass valve opened
7/26/2012	6:32:10 AM	Helium MFC set to  0.000000
7/26/2012	6:32:10 AM	H2 MFC set to  0.000000
7/26/2012	6:32:10 AM	BCl3 MFC set to  0.000000
7/26/2012	6:32:10 AM	PH3 MFC set to  0.000000
7/26/2012	6:32:10 AM	SiCl4 MFC set to  0.000000
7/26/2012	6:32:10 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	6:32:11 AM	Tube furnace set to 0
7/26/2012	6:33:35 AM	Helium valve closed
7/26/2012	6:33:35 AM	H2 valve closed
7/26/2012	6:33:35 AM	BCl3 valve closed
7/26/2012	6:33:35 AM	PH3 valve closed
7/26/2012	6:33:35 AM	SiCl4 pre valve closed
7/26/2012	6:33:35 AM	SiCl4 post valve closed
7/26/2012	6:33:35 AM	Main Vac valve closed
7/26/2012	6:33:35 AM	Bubbler valve closed
7/26/2012	6:33:35 AM	Bypass valve opened
7/26/2012	6:33:35 AM	Helium MFC set to  0.000000
7/26/2012	6:33:35 AM	H2 MFC set to  0.000000
7/26/2012	6:33:35 AM	BCl3 MFC set to  0.000000
7/26/2012	6:33:35 AM	PH3 MFC set to  0.000000
7/26/2012	6:33:35 AM	SiCl4 MFC set to  0.000000
7/26/2012	6:33:35 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	6:33:35 AM	Tube furnace set to 0
7/26/2012	6:34:35 AM	Helium valve closed
7/26/2012	6:34:35 AM	H2 valve closed
7/26/2012	6:34:35 AM	BCl3 valve closed
7/26/2012	6:34:35 AM	PH3 valve closed
7/26/2012	6:34:35 AM	SiCl4 pre valve closed
7/26/2012	6:34:35 AM	SiCl4 post valve closed
7/26/2012	6:34:35 AM	Bypass valve closed
7/26/2012	6:34:35 AM	Bubbler valve closed
7/26/2012	6:34:35 AM	Main Vac valve opened
7/26/2012	6:34:35 AM	Helium MFC set to  0.000000
7/26/2012	6:34:35 AM	H2 MFC set to  0.000000
7/26/2012	6:34:35 AM	BCl3 MFC set to  0.000000
7/26/2012	6:34:35 AM	PH3 MFC set to  0.000000
7/26/2012	6:34:35 AM	SiCl4 MFC set to  0.000000
7/26/2012	6:34:35 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	6:34:35 AM	Tube furnace set to 0
7/26/2012	6:34:36 AM	Run finished at 6:34 AM
7/26/2012	6:34:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2012	6:35:47 AM	Recipe started at 6:35 AM
7/26/2012	6:35:47 AM	Helium valve closed
7/26/2012	6:35:47 AM	H2 valve closed
7/26/2012	6:35:47 AM	BCl3 valve closed
7/26/2012	6:35:47 AM	PH3 valve closed
7/26/2012	6:35:47 AM	SiCl4 pre valve closed
7/26/2012	6:35:47 AM	SiCl4 post valve closed
7/26/2012	6:35:47 AM	Bypass valve closed
7/26/2012	6:35:47 AM	Bubbler valve closed
7/26/2012	6:35:47 AM	Main Vac valve opened
7/26/2012	6:35:47 AM	Helium MFC set to  0.000000
7/26/2012	6:35:47 AM	H2 MFC set to  0.000000
7/26/2012	6:35:47 AM	BCl3 MFC set to  0.000000
7/26/2012	6:35:47 AM	PH3 MFC set to  0.000000
7/26/2012	6:35:47 AM	SiCl4 MFC set to  0.000000
7/26/2012	6:35:47 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	6:35:48 AM	Tube furnace set to 0
7/26/2012	8:05:47 AM	Helium valve closed
7/26/2012	8:05:47 AM	H2 valve closed
7/26/2012	8:05:47 AM	BCl3 valve closed
7/26/2012	8:05:47 AM	PH3 valve closed
7/26/2012	8:05:47 AM	SiCl4 pre valve closed
7/26/2012	8:05:47 AM	SiCl4 post valve closed
7/26/2012	8:05:47 AM	Main Vac valve closed
7/26/2012	8:05:47 AM	Bypass valve closed
7/26/2012	8:05:47 AM	Bubbler valve closed
7/26/2012	8:05:47 AM	Helium MFC set to  0.000000
7/26/2012	8:05:47 AM	H2 MFC set to  0.000000
7/26/2012	8:05:47 AM	BCl3 MFC set to  0.000000
7/26/2012	8:05:47 AM	PH3 MFC set to  0.000000
7/26/2012	8:05:47 AM	SiCl4 MFC set to  0.000000
7/26/2012	8:05:47 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	8:05:48 AM	Tube furnace set to 0
7/26/2012	8:05:51 AM	Helium valve closed
7/26/2012	8:05:51 AM	BCl3 valve closed
7/26/2012	8:05:51 AM	PH3 valve closed
7/26/2012	8:05:51 AM	SiCl4 pre valve closed
7/26/2012	8:05:51 AM	SiCl4 post valve closed
7/26/2012	8:05:51 AM	Main Vac valve closed
7/26/2012	8:05:51 AM	Bypass valve closed
7/26/2012	8:05:51 AM	Bubbler valve closed
7/26/2012	8:05:51 AM	H2 valve opened
7/26/2012	8:05:51 AM	Helium MFC set to  0.000000
7/26/2012	8:05:51 AM	H2 MFC set to  500.000000
7/26/2012	8:05:51 AM	BCl3 MFC set to  0.000000
7/26/2012	8:05:51 AM	PH3 MFC set to  0.000000
7/26/2012	8:05:51 AM	SiCl4 MFC set to  0.000000
7/26/2012	8:05:51 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	8:05:51 AM	Tube furnace set to 0
7/26/2012	8:07:09 AM	Helium valve closed
7/26/2012	8:07:09 AM	BCl3 valve closed
7/26/2012	8:07:09 AM	PH3 valve closed
7/26/2012	8:07:09 AM	SiCl4 pre valve closed
7/26/2012	8:07:09 AM	SiCl4 post valve closed
7/26/2012	8:07:09 AM	Main Vac valve closed
7/26/2012	8:07:09 AM	Bypass valve closed
7/26/2012	8:07:09 AM	H2 valve opened
7/26/2012	8:07:09 AM	Bubbler valve opened
7/26/2012	8:07:09 AM	Helium MFC set to  0.000000
7/26/2012	8:07:09 AM	H2 MFC set to  500.000000
7/26/2012	8:07:09 AM	BCl3 MFC set to  0.000000
7/26/2012	8:07:09 AM	PH3 MFC set to  0.000000
7/26/2012	8:07:09 AM	SiCl4 MFC set to  0.000000
7/26/2012	8:07:09 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	8:07:09 AM	Tube furnace set to 0
7/26/2012	8:07:10 AM	Helium valve closed
7/26/2012	8:07:10 AM	BCl3 valve closed
7/26/2012	8:07:10 AM	PH3 valve closed
7/26/2012	8:07:10 AM	SiCl4 pre valve closed
7/26/2012	8:07:10 AM	SiCl4 post valve closed
7/26/2012	8:07:10 AM	Main Vac valve closed
7/26/2012	8:07:10 AM	Bypass valve closed
7/26/2012	8:07:10 AM	H2 valve opened
7/26/2012	8:07:10 AM	Bubbler valve opened
7/26/2012	8:07:10 AM	Helium MFC set to  0.000000
7/26/2012	8:07:10 AM	H2 MFC set to  500.000000
7/26/2012	8:07:10 AM	BCl3 MFC set to  0.000000
7/26/2012	8:07:10 AM	PH3 MFC set to  0.000000
7/26/2012	8:07:10 AM	SiCl4 MFC set to  0.000000
7/26/2012	8:07:10 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	8:07:10 AM	Tube furnace set to 1000
7/26/2012	8:32:10 AM	Helium valve closed
7/26/2012	8:32:10 AM	PH3 valve closed
7/26/2012	8:32:10 AM	Main Vac valve closed
7/26/2012	8:32:10 AM	Bypass valve closed
7/26/2012	8:32:10 AM	H2 valve opened
7/26/2012	8:32:10 AM	BCl3 valve opened
7/26/2012	8:32:10 AM	SiCl4 pre valve opened
7/26/2012	8:32:10 AM	SiCl4 post valve opened
7/26/2012	8:32:10 AM	Bubbler valve opened
7/26/2012	8:32:10 AM	Helium MFC set to  0.000000
7/26/2012	8:32:10 AM	H2 MFC set to  450.000000
7/26/2012	8:32:10 AM	BCl3 MFC set to  1.000000
7/26/2012	8:32:10 AM	PH3 MFC set to  0.000000
7/26/2012	8:32:10 AM	SiCl4 MFC set to  50.000000
7/26/2012	8:32:10 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	8:32:10 AM	Tube furnace set to 1000
7/26/2012	9:03:40 AM	Helium valve closed
7/26/2012	9:03:40 AM	BCl3 valve closed
7/26/2012	9:03:40 AM	Main Vac valve closed
7/26/2012	9:03:40 AM	Bypass valve closed
7/26/2012	9:03:40 AM	H2 valve opened
7/26/2012	9:03:40 AM	PH3 valve opened
7/26/2012	9:03:40 AM	SiCl4 pre valve opened
7/26/2012	9:03:40 AM	SiCl4 post valve opened
7/26/2012	9:03:40 AM	Bubbler valve opened
7/26/2012	9:03:40 AM	Helium MFC set to  0.000000
7/26/2012	9:03:40 AM	H2 MFC set to  430.000000
7/26/2012	9:03:40 AM	BCl3 MFC set to  0.000000
7/26/2012	9:03:40 AM	PH3 MFC set to  20.000000
7/26/2012	9:03:40 AM	SiCl4 MFC set to  50.000000
7/26/2012	9:03:40 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:03:41 AM	Tube furnace set to 1000
7/26/2012	9:05:11 AM	Helium valve closed
7/26/2012	9:05:11 AM	BCl3 valve closed
7/26/2012	9:05:11 AM	PH3 valve closed
7/26/2012	9:05:11 AM	SiCl4 pre valve closed
7/26/2012	9:05:11 AM	SiCl4 post valve closed
7/26/2012	9:05:11 AM	Main Vac valve closed
7/26/2012	9:05:11 AM	Bypass valve closed
7/26/2012	9:05:11 AM	H2 valve opened
7/26/2012	9:05:11 AM	Bubbler valve opened
7/26/2012	9:05:11 AM	Helium MFC set to  0.000000
7/26/2012	9:05:11 AM	H2 MFC set to  500.000000
7/26/2012	9:05:11 AM	BCl3 MFC set to  0.000000
7/26/2012	9:05:11 AM	PH3 MFC set to  0.000000
7/26/2012	9:05:11 AM	SiCl4 MFC set to  0.000000
7/26/2012	9:05:11 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:05:11 AM	Tube furnace set to 750
7/26/2012	9:20:11 AM	H2 valve closed
7/26/2012	9:20:11 AM	BCl3 valve closed
7/26/2012	9:20:11 AM	PH3 valve closed
7/26/2012	9:20:11 AM	SiCl4 pre valve closed
7/26/2012	9:20:11 AM	SiCl4 post valve closed
7/26/2012	9:20:11 AM	Main Vac valve closed
7/26/2012	9:20:11 AM	Bypass valve closed
7/26/2012	9:20:11 AM	Helium valve opened
7/26/2012	9:20:11 AM	Bubbler valve opened
7/26/2012	9:20:11 AM	Helium MFC set to  500.000000
7/26/2012	9:20:11 AM	H2 MFC set to  0.000000
7/26/2012	9:20:11 AM	BCl3 MFC set to  0.000000
7/26/2012	9:20:11 AM	PH3 MFC set to  0.000000
7/26/2012	9:20:11 AM	SiCl4 MFC set to  0.000000
7/26/2012	9:20:11 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:20:11 AM	Tube furnace set to 0
7/26/2012	9:40:11 AM	Helium valve closed
7/26/2012	9:40:11 AM	H2 valve closed
7/26/2012	9:40:11 AM	BCl3 valve closed
7/26/2012	9:40:11 AM	PH3 valve closed
7/26/2012	9:40:11 AM	SiCl4 pre valve closed
7/26/2012	9:40:11 AM	SiCl4 post valve closed
7/26/2012	9:40:11 AM	Main Vac valve closed
7/26/2012	9:40:11 AM	Bypass valve closed
7/26/2012	9:40:11 AM	Bubbler valve closed
7/26/2012	9:40:11 AM	Helium MFC set to  0.000000
7/26/2012	9:40:11 AM	H2 MFC set to  0.000000
7/26/2012	9:40:11 AM	BCl3 MFC set to  0.000000
7/26/2012	9:40:11 AM	PH3 MFC set to  0.000000
7/26/2012	9:40:11 AM	SiCl4 MFC set to  0.000000
7/26/2012	9:40:11 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:40:11 AM	Tube furnace set to 0
7/26/2012	9:46:39 AM	Helium valve closed
7/26/2012	9:46:39 AM	H2 valve closed
7/26/2012	9:46:39 AM	BCl3 valve closed
7/26/2012	9:46:39 AM	PH3 valve closed
7/26/2012	9:46:39 AM	SiCl4 pre valve closed
7/26/2012	9:46:39 AM	SiCl4 post valve closed
7/26/2012	9:46:39 AM	Main Vac valve closed
7/26/2012	9:46:39 AM	Bubbler valve closed
7/26/2012	9:46:39 AM	Bypass valve opened
7/26/2012	9:46:39 AM	Helium MFC set to  0.000000
7/26/2012	9:46:39 AM	H2 MFC set to  0.000000
7/26/2012	9:46:39 AM	BCl3 MFC set to  0.000000
7/26/2012	9:46:39 AM	PH3 MFC set to  0.000000
7/26/2012	9:46:39 AM	SiCl4 MFC set to  0.000000
7/26/2012	9:46:39 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:46:39 AM	Tube furnace set to 0
7/26/2012	9:47:36 AM	Helium valve closed
7/26/2012	9:47:36 AM	H2 valve closed
7/26/2012	9:47:36 AM	BCl3 valve closed
7/26/2012	9:47:36 AM	PH3 valve closed
7/26/2012	9:47:36 AM	SiCl4 pre valve closed
7/26/2012	9:47:36 AM	SiCl4 post valve closed
7/26/2012	9:47:36 AM	Main Vac valve closed
7/26/2012	9:47:36 AM	Bubbler valve closed
7/26/2012	9:47:36 AM	Bypass valve opened
7/26/2012	9:47:36 AM	Helium MFC set to  0.000000
7/26/2012	9:47:36 AM	H2 MFC set to  0.000000
7/26/2012	9:47:37 AM	BCl3 MFC set to  0.000000
7/26/2012	9:47:37 AM	PH3 MFC set to  0.000000
7/26/2012	9:47:37 AM	SiCl4 MFC set to  0.000000
7/26/2012	9:47:37 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:47:37 AM	Tube furnace set to 0
7/26/2012	9:48:37 AM	Helium valve closed
7/26/2012	9:48:37 AM	H2 valve closed
7/26/2012	9:48:37 AM	BCl3 valve closed
7/26/2012	9:48:37 AM	PH3 valve closed
7/26/2012	9:48:37 AM	SiCl4 pre valve closed
7/26/2012	9:48:37 AM	SiCl4 post valve closed
7/26/2012	9:48:37 AM	Bypass valve closed
7/26/2012	9:48:37 AM	Bubbler valve closed
7/26/2012	9:48:37 AM	Main Vac valve opened
7/26/2012	9:48:37 AM	Helium MFC set to  0.000000
7/26/2012	9:48:37 AM	H2 MFC set to  0.000000
7/26/2012	9:48:37 AM	BCl3 MFC set to  0.000000
7/26/2012	9:48:37 AM	PH3 MFC set to  0.000000
7/26/2012	9:48:37 AM	SiCl4 MFC set to  0.000000
7/26/2012	9:48:37 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:48:37 AM	Tube furnace set to 0
7/26/2012	9:50:28 AM	Run finished at 9:50 AM
7/26/2012	9:50:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2012	9:50:49 AM	Recipe started at 9:50 AM
7/26/2012	9:50:49 AM	Helium valve closed
7/26/2012	9:50:49 AM	H2 valve closed
7/26/2012	9:50:49 AM	BCl3 valve closed
7/26/2012	9:50:49 AM	PH3 valve closed
7/26/2012	9:50:49 AM	SiCl4 pre valve closed
7/26/2012	9:50:49 AM	SiCl4 post valve closed
7/26/2012	9:50:49 AM	Main Vac valve closed
7/26/2012	9:50:49 AM	Bypass valve closed
7/26/2012	9:50:49 AM	Bubbler valve closed
7/26/2012	9:50:49 AM	Helium MFC set to  0.000000
7/26/2012	9:50:49 AM	H2 MFC set to  0.000000
7/26/2012	9:50:49 AM	BCl3 MFC set to  0.000000
7/26/2012	9:50:49 AM	PH3 MFC set to  0.000000
7/26/2012	9:50:49 AM	SiCl4 MFC set to  0.000000
7/26/2012	9:50:49 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:50:49 AM	Tube furnace set to 0
7/26/2012	9:50:52 AM	H2 valve closed
7/26/2012	9:50:52 AM	BCl3 valve closed
7/26/2012	9:50:52 AM	PH3 valve closed
7/26/2012	9:50:52 AM	SiCl4 pre valve closed
7/26/2012	9:50:52 AM	SiCl4 post valve closed
7/26/2012	9:50:52 AM	Main Vac valve closed
7/26/2012	9:50:52 AM	Bypass valve closed
7/26/2012	9:50:52 AM	Bubbler valve closed
7/26/2012	9:50:52 AM	Helium valve opened
7/26/2012	9:50:52 AM	Helium MFC set to  500.000000
7/26/2012	9:50:52 AM	H2 MFC set to  0.000000
7/26/2012	9:50:52 AM	BCl3 MFC set to  0.000000
7/26/2012	9:50:52 AM	PH3 MFC set to  0.000000
7/26/2012	9:50:52 AM	SiCl4 MFC set to  0.000000
7/26/2012	9:50:52 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:50:52 AM	Tube furnace set to 0
7/26/2012	9:52:03 AM	Helium valve closed
7/26/2012	9:52:03 AM	H2 valve closed
7/26/2012	9:52:03 AM	BCl3 valve closed
7/26/2012	9:52:03 AM	PH3 valve closed
7/26/2012	9:52:03 AM	SiCl4 pre valve closed
7/26/2012	9:52:03 AM	SiCl4 post valve closed
7/26/2012	9:52:03 AM	Main Vac valve closed
7/26/2012	9:52:03 AM	Bypass valve closed
7/26/2012	9:52:03 AM	Bubbler valve closed
7/26/2012	9:52:03 AM	Helium MFC set to  0.000000
7/26/2012	9:52:03 AM	H2 MFC set to  0.000000
7/26/2012	9:52:03 AM	BCl3 MFC set to  0.000000
7/26/2012	9:52:03 AM	PH3 MFC set to  0.000000
7/26/2012	9:52:03 AM	SiCl4 MFC set to  0.000000
7/26/2012	9:52:03 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:52:03 AM	Tube furnace set to 0
7/26/2012	9:52:04 AM	Run finished at 9:52 AM
7/26/2012	9:52:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2012	9:57:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2012	9:57:57 AM	Recipe started at 9:57 AM
7/26/2012	9:57:57 AM	Helium valve closed
7/26/2012	9:57:57 AM	H2 valve closed
7/26/2012	9:57:57 AM	BCl3 valve closed
7/26/2012	9:57:57 AM	PH3 valve closed
7/26/2012	9:57:57 AM	SiCl4 pre valve closed
7/26/2012	9:57:57 AM	SiCl4 post valve closed
7/26/2012	9:57:57 AM	Main Vac valve closed
7/26/2012	9:57:57 AM	Bubbler valve closed
7/26/2012	9:57:57 AM	Bypass valve opened
7/26/2012	9:57:57 AM	Helium MFC set to  0.000000
7/26/2012	9:57:57 AM	H2 MFC set to  0.000000
7/26/2012	9:57:57 AM	BCl3 MFC set to  0.000000
7/26/2012	9:57:57 AM	PH3 MFC set to  0.000000
7/26/2012	9:57:57 AM	SiCl4 MFC set to  0.000000
7/26/2012	9:57:57 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:57:58 AM	Tube furnace set to 0
7/26/2012	9:59:15 AM	Helium valve closed
7/26/2012	9:59:15 AM	H2 valve closed
7/26/2012	9:59:15 AM	BCl3 valve closed
7/26/2012	9:59:15 AM	PH3 valve closed
7/26/2012	9:59:15 AM	SiCl4 pre valve closed
7/26/2012	9:59:15 AM	SiCl4 post valve closed
7/26/2012	9:59:15 AM	Main Vac valve closed
7/26/2012	9:59:15 AM	Bubbler valve closed
7/26/2012	9:59:15 AM	Bypass valve opened
7/26/2012	9:59:15 AM	Helium MFC set to  0.000000
7/26/2012	9:59:15 AM	H2 MFC set to  0.000000
7/26/2012	9:59:15 AM	BCl3 MFC set to  0.000000
7/26/2012	9:59:15 AM	PH3 MFC set to  0.000000
7/26/2012	9:59:15 AM	SiCl4 MFC set to  0.000000
7/26/2012	9:59:15 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:59:16 AM	Tube furnace set to 0
7/26/2012	10:00:16 AM	Helium valve closed
7/26/2012	10:00:16 AM	H2 valve closed
7/26/2012	10:00:16 AM	BCl3 valve closed
7/26/2012	10:00:16 AM	PH3 valve closed
7/26/2012	10:00:16 AM	SiCl4 pre valve closed
7/26/2012	10:00:16 AM	SiCl4 post valve closed
7/26/2012	10:00:16 AM	Bypass valve closed
7/26/2012	10:00:16 AM	Bubbler valve closed
7/26/2012	10:00:16 AM	Main Vac valve opened
7/26/2012	10:00:16 AM	Helium MFC set to  0.000000
7/26/2012	10:00:16 AM	H2 MFC set to  0.000000
7/26/2012	10:00:16 AM	BCl3 MFC set to  0.000000
7/26/2012	10:00:16 AM	PH3 MFC set to  0.000000
7/26/2012	10:00:16 AM	SiCl4 MFC set to  0.000000
7/26/2012	10:00:16 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	10:00:16 AM	Tube furnace set to 0
7/26/2012	10:00:17 AM	Run finished at 10:00 AM
7/26/2012	10:00:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2012	11:55:37 AM	Main Vac valve closed
7/26/2012	11:55:49 AM	Main Vac valve opened
7/26/2012	11:56:28 AM	Recipe started at 11:56 AM
7/26/2012	11:56:28 AM	Helium valve closed
7/26/2012	11:56:28 AM	H2 valve closed
7/26/2012	11:56:28 AM	BCl3 valve closed
7/26/2012	11:56:28 AM	PH3 valve closed
7/26/2012	11:56:28 AM	SiCl4 pre valve closed
7/26/2012	11:56:28 AM	SiCl4 post valve closed
7/26/2012	11:56:28 AM	Bypass valve closed
7/26/2012	11:56:28 AM	Bubbler valve closed
7/26/2012	11:56:28 AM	Main Vac valve opened
7/26/2012	11:56:28 AM	Helium MFC set to  0.000000
7/26/2012	11:56:28 AM	H2 MFC set to  0.000000
7/26/2012	11:56:28 AM	BCl3 MFC set to  0.000000
7/26/2012	11:56:28 AM	PH3 MFC set to  0.000000
7/26/2012	11:56:28 AM	SiCl4 MFC set to  0.000000
7/26/2012	11:56:28 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	11:56:28 AM	Tube furnace set to 0
7/26/2012	11:56:31 AM	Helium valve closed
7/26/2012	11:56:31 AM	H2 valve closed
7/26/2012	11:56:31 AM	BCl3 valve closed
7/26/2012	11:56:31 AM	PH3 valve closed
7/26/2012	11:56:31 AM	SiCl4 pre valve closed
7/26/2012	11:56:31 AM	SiCl4 post valve closed
7/26/2012	11:56:31 AM	Main Vac valve closed
7/26/2012	11:56:31 AM	Bypass valve closed
7/26/2012	11:56:31 AM	Bubbler valve closed
7/26/2012	11:56:31 AM	Helium MFC set to  0.000000
7/26/2012	11:56:31 AM	H2 MFC set to  0.000000
7/26/2012	11:56:31 AM	BCl3 MFC set to  0.000000
7/26/2012	11:56:31 AM	PH3 MFC set to  0.000000
7/26/2012	11:56:31 AM	SiCl4 MFC set to  0.000000
7/26/2012	11:56:31 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	11:56:31 AM	Tube furnace set to 0
7/26/2012	11:56:34 AM	Helium valve closed
7/26/2012	11:56:34 AM	BCl3 valve closed
7/26/2012	11:56:34 AM	PH3 valve closed
7/26/2012	11:56:34 AM	SiCl4 pre valve closed
7/26/2012	11:56:34 AM	SiCl4 post valve closed
7/26/2012	11:56:34 AM	Main Vac valve closed
7/26/2012	11:56:34 AM	Bypass valve closed
7/26/2012	11:56:34 AM	Bubbler valve closed
7/26/2012	11:56:34 AM	H2 valve opened
7/26/2012	11:56:34 AM	Helium MFC set to  0.000000
7/26/2012	11:56:34 AM	H2 MFC set to  500.000000
7/26/2012	11:56:34 AM	BCl3 MFC set to  0.000000
7/26/2012	11:56:34 AM	PH3 MFC set to  0.000000
7/26/2012	11:56:34 AM	SiCl4 MFC set to  0.000000
7/26/2012	11:56:34 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	11:56:35 AM	Tube furnace set to 0
7/26/2012	11:57:50 AM	Helium valve closed
7/26/2012	11:57:50 AM	BCl3 valve closed
7/26/2012	11:57:50 AM	PH3 valve closed
7/26/2012	11:57:50 AM	SiCl4 pre valve closed
7/26/2012	11:57:50 AM	SiCl4 post valve closed
7/26/2012	11:57:50 AM	Main Vac valve closed
7/26/2012	11:57:50 AM	Bypass valve closed
7/26/2012	11:57:50 AM	H2 valve opened
7/26/2012	11:57:50 AM	Bubbler valve opened
7/26/2012	11:57:50 AM	Helium MFC set to  0.000000
7/26/2012	11:57:50 AM	H2 MFC set to  500.000000
7/26/2012	11:57:50 AM	BCl3 MFC set to  0.000000
7/26/2012	11:57:50 AM	PH3 MFC set to  0.000000
7/26/2012	11:57:50 AM	SiCl4 MFC set to  0.000000
7/26/2012	11:57:50 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	11:57:50 AM	Tube furnace set to 0
7/26/2012	11:57:51 AM	Helium valve closed
7/26/2012	11:57:51 AM	BCl3 valve closed
7/26/2012	11:57:51 AM	PH3 valve closed
7/26/2012	11:57:51 AM	SiCl4 pre valve closed
7/26/2012	11:57:51 AM	SiCl4 post valve closed
7/26/2012	11:57:51 AM	Main Vac valve closed
7/26/2012	11:57:51 AM	Bypass valve closed
7/26/2012	11:57:51 AM	H2 valve opened
7/26/2012	11:57:51 AM	Bubbler valve opened
7/26/2012	11:57:51 AM	Helium MFC set to  0.000000
7/26/2012	11:57:51 AM	H2 MFC set to  500.000000
7/26/2012	11:57:51 AM	BCl3 MFC set to  0.000000
7/26/2012	11:57:51 AM	PH3 MFC set to  0.000000
7/26/2012	11:57:51 AM	SiCl4 MFC set to  0.000000
7/26/2012	11:57:51 AM	Bypass solenoid MFC set to  0.000000
7/26/2012	11:57:52 AM	Tube furnace set to 1000
7/26/2012	12:22:52 PM	Helium valve closed
7/26/2012	12:22:52 PM	PH3 valve closed
7/26/2012	12:22:52 PM	Main Vac valve closed
7/26/2012	12:22:52 PM	Bypass valve closed
7/26/2012	12:22:52 PM	H2 valve opened
7/26/2012	12:22:52 PM	BCl3 valve opened
7/26/2012	12:22:52 PM	SiCl4 pre valve opened
7/26/2012	12:22:52 PM	SiCl4 post valve opened
7/26/2012	12:22:52 PM	Bubbler valve opened
7/26/2012	12:22:52 PM	Helium MFC set to  0.000000
7/26/2012	12:22:52 PM	H2 MFC set to  450.000000
7/26/2012	12:22:52 PM	BCl3 MFC set to  1.000000
7/26/2012	12:22:52 PM	PH3 MFC set to  0.000000
7/26/2012	12:22:52 PM	SiCl4 MFC set to  50.000000
7/26/2012	12:22:52 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	12:22:52 PM	Tube furnace set to 1000
7/26/2012	12:54:22 PM	Helium valve closed
7/26/2012	12:54:22 PM	BCl3 valve closed
7/26/2012	12:54:22 PM	Main Vac valve closed
7/26/2012	12:54:22 PM	Bypass valve closed
7/26/2012	12:54:22 PM	H2 valve opened
7/26/2012	12:54:22 PM	PH3 valve opened
7/26/2012	12:54:22 PM	SiCl4 pre valve opened
7/26/2012	12:54:22 PM	SiCl4 post valve opened
7/26/2012	12:54:22 PM	Bubbler valve opened
7/26/2012	12:54:22 PM	Helium MFC set to  0.000000
7/26/2012	12:54:22 PM	H2 MFC set to  430.000000
7/26/2012	12:54:22 PM	BCl3 MFC set to  0.000000
7/26/2012	12:54:22 PM	PH3 MFC set to  20.000000
7/26/2012	12:54:22 PM	SiCl4 MFC set to  50.000000
7/26/2012	12:54:22 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	12:54:22 PM	Tube furnace set to 1000
7/26/2012	12:55:52 PM	Helium valve closed
7/26/2012	12:55:52 PM	BCl3 valve closed
7/26/2012	12:55:52 PM	PH3 valve closed
7/26/2012	12:55:52 PM	SiCl4 pre valve closed
7/26/2012	12:55:52 PM	SiCl4 post valve closed
7/26/2012	12:55:52 PM	Main Vac valve closed
7/26/2012	12:55:52 PM	Bypass valve closed
7/26/2012	12:55:52 PM	H2 valve opened
7/26/2012	12:55:52 PM	Bubbler valve opened
7/26/2012	12:55:52 PM	Helium MFC set to  0.000000
7/26/2012	12:55:52 PM	H2 MFC set to  500.000000
7/26/2012	12:55:52 PM	BCl3 MFC set to  0.000000
7/26/2012	12:55:52 PM	PH3 MFC set to  0.000000
7/26/2012	12:55:52 PM	SiCl4 MFC set to  0.000000
7/26/2012	12:55:52 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	12:55:52 PM	Tube furnace set to 750
7/26/2012	1:10:52 PM	H2 valve closed
7/26/2012	1:10:52 PM	BCl3 valve closed
7/26/2012	1:10:52 PM	PH3 valve closed
7/26/2012	1:10:52 PM	SiCl4 pre valve closed
7/26/2012	1:10:52 PM	SiCl4 post valve closed
7/26/2012	1:10:52 PM	Main Vac valve closed
7/26/2012	1:10:52 PM	Bypass valve closed
7/26/2012	1:10:52 PM	Helium valve opened
7/26/2012	1:10:52 PM	Bubbler valve opened
7/26/2012	1:10:52 PM	Helium MFC set to  500.000000
7/26/2012	1:10:52 PM	H2 MFC set to  0.000000
7/26/2012	1:10:52 PM	BCl3 MFC set to  0.000000
7/26/2012	1:10:52 PM	PH3 MFC set to  0.000000
7/26/2012	1:10:52 PM	SiCl4 MFC set to  0.000000
7/26/2012	1:10:52 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:10:53 PM	Tube furnace set to 0
7/26/2012	1:30:52 PM	Helium valve closed
7/26/2012	1:30:53 PM	H2 valve closed
7/26/2012	1:30:53 PM	BCl3 valve closed
7/26/2012	1:30:53 PM	PH3 valve closed
7/26/2012	1:30:53 PM	SiCl4 pre valve closed
7/26/2012	1:30:53 PM	SiCl4 post valve closed
7/26/2012	1:30:53 PM	Main Vac valve closed
7/26/2012	1:30:53 PM	Bypass valve closed
7/26/2012	1:30:53 PM	Bubbler valve closed
7/26/2012	1:30:53 PM	Helium MFC set to  0.000000
7/26/2012	1:30:53 PM	H2 MFC set to  0.000000
7/26/2012	1:30:53 PM	BCl3 MFC set to  0.000000
7/26/2012	1:30:53 PM	PH3 MFC set to  0.000000
7/26/2012	1:30:53 PM	SiCl4 MFC set to  0.000000
7/26/2012	1:30:53 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:30:53 PM	Tube furnace set to 0
7/26/2012	1:40:52 PM	Helium valve closed
7/26/2012	1:40:52 PM	H2 valve closed
7/26/2012	1:40:52 PM	BCl3 valve closed
7/26/2012	1:40:52 PM	PH3 valve closed
7/26/2012	1:40:52 PM	SiCl4 pre valve closed
7/26/2012	1:40:52 PM	SiCl4 post valve closed
7/26/2012	1:40:52 PM	Main Vac valve closed
7/26/2012	1:40:52 PM	Bubbler valve closed
7/26/2012	1:40:52 PM	Bypass valve opened
7/26/2012	1:40:52 PM	Helium MFC set to  0.000000
7/26/2012	1:40:52 PM	H2 MFC set to  0.000000
7/26/2012	1:40:52 PM	BCl3 MFC set to  0.000000
7/26/2012	1:40:52 PM	PH3 MFC set to  0.000000
7/26/2012	1:40:52 PM	SiCl4 MFC set to  0.000000
7/26/2012	1:40:52 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:40:52 PM	Tube furnace set to 0
7/26/2012	1:41:51 PM	Helium valve closed
7/26/2012	1:41:51 PM	H2 valve closed
7/26/2012	1:41:51 PM	BCl3 valve closed
7/26/2012	1:41:51 PM	PH3 valve closed
7/26/2012	1:41:51 PM	SiCl4 pre valve closed
7/26/2012	1:41:51 PM	SiCl4 post valve closed
7/26/2012	1:41:51 PM	Main Vac valve closed
7/26/2012	1:41:51 PM	Bubbler valve closed
7/26/2012	1:41:51 PM	Bypass valve opened
7/26/2012	1:41:51 PM	Helium MFC set to  0.000000
7/26/2012	1:41:51 PM	H2 MFC set to  0.000000
7/26/2012	1:41:51 PM	BCl3 MFC set to  0.000000
7/26/2012	1:41:51 PM	PH3 MFC set to  0.000000
7/26/2012	1:41:51 PM	SiCl4 MFC set to  0.000000
7/26/2012	1:41:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:41:51 PM	Tube furnace set to 0
7/26/2012	1:42:51 PM	Helium valve closed
7/26/2012	1:42:51 PM	H2 valve closed
7/26/2012	1:42:51 PM	BCl3 valve closed
7/26/2012	1:42:51 PM	PH3 valve closed
7/26/2012	1:42:51 PM	SiCl4 pre valve closed
7/26/2012	1:42:51 PM	SiCl4 post valve closed
7/26/2012	1:42:51 PM	Bypass valve closed
7/26/2012	1:42:51 PM	Bubbler valve closed
7/26/2012	1:42:51 PM	Main Vac valve opened
7/26/2012	1:42:51 PM	Helium MFC set to  0.000000
7/26/2012	1:42:51 PM	H2 MFC set to  0.000000
7/26/2012	1:42:51 PM	BCl3 MFC set to  0.000000
7/26/2012	1:42:51 PM	PH3 MFC set to  0.000000
7/26/2012	1:42:51 PM	SiCl4 MFC set to  0.000000
7/26/2012	1:42:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:42:52 PM	Tube furnace set to 0
7/26/2012	1:43:18 PM	Run finished at 1:43 PM
7/26/2012	1:43:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2012	1:43:24 PM	Recipe started at 1:43 PM
7/26/2012	1:43:24 PM	Helium valve closed
7/26/2012	1:43:24 PM	H2 valve closed
7/26/2012	1:43:24 PM	BCl3 valve closed
7/26/2012	1:43:24 PM	PH3 valve closed
7/26/2012	1:43:24 PM	SiCl4 pre valve closed
7/26/2012	1:43:24 PM	SiCl4 post valve closed
7/26/2012	1:43:24 PM	Main Vac valve closed
7/26/2012	1:43:24 PM	Bypass valve closed
7/26/2012	1:43:24 PM	Bubbler valve closed
7/26/2012	1:43:24 PM	Helium MFC set to  0.000000
7/26/2012	1:43:24 PM	H2 MFC set to  0.000000
7/26/2012	1:43:24 PM	BCl3 MFC set to  0.000000
7/26/2012	1:43:24 PM	PH3 MFC set to  0.000000
7/26/2012	1:43:24 PM	SiCl4 MFC set to  0.000000
7/26/2012	1:43:24 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:43:24 PM	Tube furnace set to 0
7/26/2012	1:43:27 PM	H2 valve closed
7/26/2012	1:43:27 PM	BCl3 valve closed
7/26/2012	1:43:27 PM	PH3 valve closed
7/26/2012	1:43:27 PM	SiCl4 pre valve closed
7/26/2012	1:43:27 PM	SiCl4 post valve closed
7/26/2012	1:43:27 PM	Main Vac valve closed
7/26/2012	1:43:27 PM	Bypass valve closed
7/26/2012	1:43:27 PM	Bubbler valve closed
7/26/2012	1:43:27 PM	Helium valve opened
7/26/2012	1:43:27 PM	Helium MFC set to  500.000000
7/26/2012	1:43:27 PM	H2 MFC set to  0.000000
7/26/2012	1:43:27 PM	BCl3 MFC set to  0.000000
7/26/2012	1:43:27 PM	PH3 MFC set to  0.000000
7/26/2012	1:43:27 PM	SiCl4 MFC set to  0.000000
7/26/2012	1:43:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:43:27 PM	Tube furnace set to 0
7/26/2012	1:44:38 PM	Helium valve closed
7/26/2012	1:44:38 PM	H2 valve closed
7/26/2012	1:44:38 PM	BCl3 valve closed
7/26/2012	1:44:38 PM	PH3 valve closed
7/26/2012	1:44:38 PM	SiCl4 pre valve closed
7/26/2012	1:44:38 PM	SiCl4 post valve closed
7/26/2012	1:44:38 PM	Main Vac valve closed
7/26/2012	1:44:38 PM	Bypass valve closed
7/26/2012	1:44:38 PM	Bubbler valve closed
7/26/2012	1:44:38 PM	Helium MFC set to  0.000000
7/26/2012	1:44:38 PM	H2 MFC set to  0.000000
7/26/2012	1:44:38 PM	BCl3 MFC set to  0.000000
7/26/2012	1:44:38 PM	PH3 MFC set to  0.000000
7/26/2012	1:44:38 PM	SiCl4 MFC set to  0.000000
7/26/2012	1:44:38 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:44:39 PM	Tube furnace set to 0
7/26/2012	1:44:40 PM	Run finished at 1:44 PM
7/26/2012	1:44:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2012	1:59:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2012	1:59:48 PM	Recipe started at 1:59 PM
7/26/2012	1:59:48 PM	Helium valve closed
7/26/2012	1:59:48 PM	H2 valve closed
7/26/2012	1:59:48 PM	BCl3 valve closed
7/26/2012	1:59:48 PM	PH3 valve closed
7/26/2012	1:59:48 PM	SiCl4 pre valve closed
7/26/2012	1:59:48 PM	SiCl4 post valve closed
7/26/2012	1:59:48 PM	Main Vac valve closed
7/26/2012	1:59:49 PM	Bubbler valve closed
7/26/2012	1:59:49 PM	Bypass valve opened
7/26/2012	1:59:49 PM	Helium MFC set to  0.000000
7/26/2012	1:59:49 PM	H2 MFC set to  0.000000
7/26/2012	1:59:49 PM	BCl3 MFC set to  0.000000
7/26/2012	1:59:49 PM	PH3 MFC set to  0.000000
7/26/2012	1:59:49 PM	SiCl4 MFC set to  0.000000
7/26/2012	1:59:49 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	1:59:49 PM	Tube furnace set to 0
7/26/2012	2:01:14 PM	Helium valve closed
7/26/2012	2:01:14 PM	H2 valve closed
7/26/2012	2:01:14 PM	BCl3 valve closed
7/26/2012	2:01:14 PM	PH3 valve closed
7/26/2012	2:01:14 PM	SiCl4 pre valve closed
7/26/2012	2:01:14 PM	SiCl4 post valve closed
7/26/2012	2:01:14 PM	Main Vac valve closed
7/26/2012	2:01:14 PM	Bubbler valve closed
7/26/2012	2:01:14 PM	Bypass valve opened
7/26/2012	2:01:14 PM	Helium MFC set to  0.000000
7/26/2012	2:01:14 PM	H2 MFC set to  0.000000
7/26/2012	2:01:14 PM	BCl3 MFC set to  0.000000
7/26/2012	2:01:14 PM	PH3 MFC set to  0.000000
7/26/2012	2:01:14 PM	SiCl4 MFC set to  0.000000
7/26/2012	2:01:14 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	2:01:14 PM	Tube furnace set to 0
7/26/2012	2:02:14 PM	Helium valve closed
7/26/2012	2:02:14 PM	H2 valve closed
7/26/2012	2:02:14 PM	BCl3 valve closed
7/26/2012	2:02:14 PM	PH3 valve closed
7/26/2012	2:02:14 PM	SiCl4 pre valve closed
7/26/2012	2:02:14 PM	SiCl4 post valve closed
7/26/2012	2:02:14 PM	Bypass valve closed
7/26/2012	2:02:14 PM	Bubbler valve closed
7/26/2012	2:02:14 PM	Main Vac valve opened
7/26/2012	2:02:14 PM	Helium MFC set to  0.000000
7/26/2012	2:02:14 PM	H2 MFC set to  0.000000
7/26/2012	2:02:14 PM	BCl3 MFC set to  0.000000
7/26/2012	2:02:14 PM	PH3 MFC set to  0.000000
7/26/2012	2:02:14 PM	SiCl4 MFC set to  0.000000
7/26/2012	2:02:14 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	2:02:14 PM	Tube furnace set to 0
7/26/2012	2:02:15 PM	Run finished at 2:02 PM
7/26/2012	2:02:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2012	3:34:43 PM	Main Vac valve closed
7/26/2012	3:34:55 PM	Main Vac valve opened
7/26/2012	3:35:24 PM	Recipe started at 3:35 PM
7/26/2012	3:35:24 PM	Helium valve closed
7/26/2012	3:35:24 PM	H2 valve closed
7/26/2012	3:35:24 PM	BCl3 valve closed
7/26/2012	3:35:24 PM	PH3 valve closed
7/26/2012	3:35:24 PM	SiCl4 pre valve closed
7/26/2012	3:35:24 PM	SiCl4 post valve closed
7/26/2012	3:35:24 PM	Bypass valve closed
7/26/2012	3:35:24 PM	Bubbler valve closed
7/26/2012	3:35:24 PM	Main Vac valve opened
7/26/2012	3:35:24 PM	Helium MFC set to  0.000000
7/26/2012	3:35:24 PM	H2 MFC set to  0.000000
7/26/2012	3:35:24 PM	BCl3 MFC set to  0.000000
7/26/2012	3:35:24 PM	PH3 MFC set to  0.000000
7/26/2012	3:35:24 PM	SiCl4 MFC set to  0.000000
7/26/2012	3:35:24 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	3:35:25 PM	Tube furnace set to 0
7/26/2012	3:35:28 PM	Helium valve closed
7/26/2012	3:35:28 PM	H2 valve closed
7/26/2012	3:35:28 PM	BCl3 valve closed
7/26/2012	3:35:28 PM	PH3 valve closed
7/26/2012	3:35:28 PM	SiCl4 pre valve closed
7/26/2012	3:35:28 PM	SiCl4 post valve closed
7/26/2012	3:35:28 PM	Main Vac valve closed
7/26/2012	3:35:28 PM	Bypass valve closed
7/26/2012	3:35:28 PM	Bubbler valve closed
7/26/2012	3:35:28 PM	Helium MFC set to  0.000000
7/26/2012	3:35:28 PM	H2 MFC set to  0.000000
7/26/2012	3:35:28 PM	BCl3 MFC set to  0.000000
7/26/2012	3:35:28 PM	PH3 MFC set to  0.000000
7/26/2012	3:35:28 PM	SiCl4 MFC set to  0.000000
7/26/2012	3:35:28 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	3:35:28 PM	Tube furnace set to 0
7/26/2012	3:35:31 PM	Helium valve closed
7/26/2012	3:35:31 PM	BCl3 valve closed
7/26/2012	3:35:31 PM	PH3 valve closed
7/26/2012	3:35:31 PM	SiCl4 pre valve closed
7/26/2012	3:35:31 PM	SiCl4 post valve closed
7/26/2012	3:35:31 PM	Main Vac valve closed
7/26/2012	3:35:31 PM	Bypass valve closed
7/26/2012	3:35:31 PM	Bubbler valve closed
7/26/2012	3:35:31 PM	H2 valve opened
7/26/2012	3:35:31 PM	Helium MFC set to  0.000000
7/26/2012	3:35:31 PM	H2 MFC set to  500.000000
7/26/2012	3:35:31 PM	BCl3 MFC set to  0.000000
7/26/2012	3:35:31 PM	PH3 MFC set to  0.000000
7/26/2012	3:35:31 PM	SiCl4 MFC set to  0.000000
7/26/2012	3:35:31 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	3:35:31 PM	Tube furnace set to 0
7/26/2012	3:36:46 PM	Helium valve closed
7/26/2012	3:36:46 PM	BCl3 valve closed
7/26/2012	3:36:46 PM	PH3 valve closed
7/26/2012	3:36:46 PM	SiCl4 pre valve closed
7/26/2012	3:36:46 PM	SiCl4 post valve closed
7/26/2012	3:36:46 PM	Main Vac valve closed
7/26/2012	3:36:46 PM	Bypass valve closed
7/26/2012	3:36:46 PM	H2 valve opened
7/26/2012	3:36:46 PM	Bubbler valve opened
7/26/2012	3:36:46 PM	Helium MFC set to  0.000000
7/26/2012	3:36:46 PM	H2 MFC set to  500.000000
7/26/2012	3:36:46 PM	BCl3 MFC set to  0.000000
7/26/2012	3:36:46 PM	PH3 MFC set to  0.000000
7/26/2012	3:36:46 PM	SiCl4 MFC set to  0.000000
7/26/2012	3:36:46 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	3:36:46 PM	Tube furnace set to 0
7/26/2012	3:36:47 PM	Helium valve closed
7/26/2012	3:36:47 PM	BCl3 valve closed
7/26/2012	3:36:47 PM	PH3 valve closed
7/26/2012	3:36:47 PM	SiCl4 pre valve closed
7/26/2012	3:36:47 PM	SiCl4 post valve closed
7/26/2012	3:36:47 PM	Main Vac valve closed
7/26/2012	3:36:47 PM	Bypass valve closed
7/26/2012	3:36:47 PM	H2 valve opened
7/26/2012	3:36:47 PM	Bubbler valve opened
7/26/2012	3:36:47 PM	Helium MFC set to  0.000000
7/26/2012	3:36:47 PM	H2 MFC set to  500.000000
7/26/2012	3:36:47 PM	BCl3 MFC set to  0.000000
7/26/2012	3:36:47 PM	PH3 MFC set to  0.000000
7/26/2012	3:36:47 PM	SiCl4 MFC set to  0.000000
7/26/2012	3:36:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	3:36:47 PM	Tube furnace set to 1000
7/26/2012	4:01:47 PM	Helium valve closed
7/26/2012	4:01:47 PM	PH3 valve closed
7/26/2012	4:01:47 PM	Main Vac valve closed
7/26/2012	4:01:47 PM	Bypass valve closed
7/26/2012	4:01:47 PM	H2 valve opened
7/26/2012	4:01:47 PM	BCl3 valve opened
7/26/2012	4:01:47 PM	SiCl4 pre valve opened
7/26/2012	4:01:47 PM	SiCl4 post valve opened
7/26/2012	4:01:47 PM	Bubbler valve opened
7/26/2012	4:01:47 PM	Helium MFC set to  0.000000
7/26/2012	4:01:47 PM	H2 MFC set to  450.000000
7/26/2012	4:01:47 PM	BCl3 MFC set to  1.000000
7/26/2012	4:01:47 PM	PH3 MFC set to  0.000000
7/26/2012	4:01:47 PM	SiCl4 MFC set to  50.000000
7/26/2012	4:01:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	4:01:47 PM	Tube furnace set to 1000
7/26/2012	4:33:17 PM	Helium valve closed
7/26/2012	4:33:17 PM	BCl3 valve closed
7/26/2012	4:33:17 PM	Main Vac valve closed
7/26/2012	4:33:17 PM	Bypass valve closed
7/26/2012	4:33:17 PM	H2 valve opened
7/26/2012	4:33:17 PM	PH3 valve opened
7/26/2012	4:33:17 PM	SiCl4 pre valve opened
7/26/2012	4:33:17 PM	SiCl4 post valve opened
7/26/2012	4:33:17 PM	Bubbler valve opened
7/26/2012	4:33:17 PM	Helium MFC set to  0.000000
7/26/2012	4:33:17 PM	H2 MFC set to  430.000000
7/26/2012	4:33:17 PM	BCl3 MFC set to  0.000000
7/26/2012	4:33:17 PM	PH3 MFC set to  20.000000
7/26/2012	4:33:17 PM	SiCl4 MFC set to  50.000000
7/26/2012	4:33:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	4:33:18 PM	Tube furnace set to 1000
7/26/2012	4:34:48 PM	Helium valve closed
7/26/2012	4:34:48 PM	BCl3 valve closed
7/26/2012	4:34:48 PM	PH3 valve closed
7/26/2012	4:34:48 PM	SiCl4 pre valve closed
7/26/2012	4:34:48 PM	SiCl4 post valve closed
7/26/2012	4:34:48 PM	Main Vac valve closed
7/26/2012	4:34:48 PM	Bypass valve closed
7/26/2012	4:34:48 PM	H2 valve opened
7/26/2012	4:34:48 PM	Bubbler valve opened
7/26/2012	4:34:48 PM	Helium MFC set to  0.000000
7/26/2012	4:34:48 PM	H2 MFC set to  500.000000
7/26/2012	4:34:48 PM	BCl3 MFC set to  0.000000
7/26/2012	4:34:48 PM	PH3 MFC set to  0.000000
7/26/2012	4:34:48 PM	SiCl4 MFC set to  0.000000
7/26/2012	4:34:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	4:34:48 PM	Tube furnace set to 750
7/26/2012	4:49:48 PM	H2 valve closed
7/26/2012	4:49:48 PM	BCl3 valve closed
7/26/2012	4:49:48 PM	PH3 valve closed
7/26/2012	4:49:48 PM	SiCl4 pre valve closed
7/26/2012	4:49:48 PM	SiCl4 post valve closed
7/26/2012	4:49:48 PM	Main Vac valve closed
7/26/2012	4:49:48 PM	Bypass valve closed
7/26/2012	4:49:48 PM	Helium valve opened
7/26/2012	4:49:48 PM	Bubbler valve opened
7/26/2012	4:49:48 PM	Helium MFC set to  500.000000
7/26/2012	4:49:48 PM	H2 MFC set to  0.000000
7/26/2012	4:49:48 PM	BCl3 MFC set to  0.000000
7/26/2012	4:49:48 PM	PH3 MFC set to  0.000000
7/26/2012	4:49:48 PM	SiCl4 MFC set to  0.000000
7/26/2012	4:49:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	4:49:48 PM	Tube furnace set to 0
7/26/2012	5:09:48 PM	Helium valve closed
7/26/2012	5:09:48 PM	H2 valve closed
7/26/2012	5:09:48 PM	BCl3 valve closed
7/26/2012	5:09:48 PM	PH3 valve closed
7/26/2012	5:09:48 PM	SiCl4 pre valve closed
7/26/2012	5:09:48 PM	SiCl4 post valve closed
7/26/2012	5:09:48 PM	Main Vac valve closed
7/26/2012	5:09:48 PM	Bypass valve closed
7/26/2012	5:09:48 PM	Bubbler valve closed
7/26/2012	5:09:48 PM	Helium MFC set to  0.000000
7/26/2012	5:09:48 PM	H2 MFC set to  0.000000
7/26/2012	5:09:48 PM	BCl3 MFC set to  0.000000
7/26/2012	5:09:48 PM	PH3 MFC set to  0.000000
7/26/2012	5:09:48 PM	SiCl4 MFC set to  0.000000
7/26/2012	5:09:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	5:09:48 PM	Tube furnace set to 0
7/26/2012	5:21:09 PM	Helium valve closed
7/26/2012	5:21:09 PM	H2 valve closed
7/26/2012	5:21:09 PM	BCl3 valve closed
7/26/2012	5:21:09 PM	PH3 valve closed
7/26/2012	5:21:09 PM	SiCl4 pre valve closed
7/26/2012	5:21:09 PM	SiCl4 post valve closed
7/26/2012	5:21:09 PM	Main Vac valve closed
7/26/2012	5:21:09 PM	Bubbler valve closed
7/26/2012	5:21:09 PM	Bypass valve opened
7/26/2012	5:21:09 PM	Helium MFC set to  0.000000
7/26/2012	5:21:09 PM	H2 MFC set to  0.000000
7/26/2012	5:21:09 PM	BCl3 MFC set to  0.000000
7/26/2012	5:21:09 PM	PH3 MFC set to  0.000000
7/26/2012	5:21:09 PM	SiCl4 MFC set to  0.000000
7/26/2012	5:21:09 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	5:21:10 PM	Tube furnace set to 0
7/26/2012	5:22:07 PM	Helium valve closed
7/26/2012	5:22:07 PM	H2 valve closed
7/26/2012	5:22:07 PM	BCl3 valve closed
7/26/2012	5:22:07 PM	PH3 valve closed
7/26/2012	5:22:07 PM	SiCl4 pre valve closed
7/26/2012	5:22:07 PM	SiCl4 post valve closed
7/26/2012	5:22:07 PM	Main Vac valve closed
7/26/2012	5:22:07 PM	Bubbler valve closed
7/26/2012	5:22:07 PM	Bypass valve opened
7/26/2012	5:22:07 PM	Helium MFC set to  0.000000
7/26/2012	5:22:07 PM	H2 MFC set to  0.000000
7/26/2012	5:22:07 PM	BCl3 MFC set to  0.000000
7/26/2012	5:22:07 PM	PH3 MFC set to  0.000000
7/26/2012	5:22:07 PM	SiCl4 MFC set to  0.000000
7/26/2012	5:22:07 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	5:22:08 PM	Tube furnace set to 0
7/26/2012	5:23:08 PM	Helium valve closed
7/26/2012	5:23:08 PM	H2 valve closed
7/26/2012	5:23:08 PM	BCl3 valve closed
7/26/2012	5:23:08 PM	PH3 valve closed
7/26/2012	5:23:08 PM	SiCl4 pre valve closed
7/26/2012	5:23:08 PM	SiCl4 post valve closed
7/26/2012	5:23:08 PM	Bypass valve closed
7/26/2012	5:23:08 PM	Bubbler valve closed
7/26/2012	5:23:08 PM	Main Vac valve opened
7/26/2012	5:23:08 PM	Helium MFC set to  0.000000
7/26/2012	5:23:08 PM	H2 MFC set to  0.000000
7/26/2012	5:23:08 PM	BCl3 MFC set to  0.000000
7/26/2012	5:23:08 PM	PH3 MFC set to  0.000000
7/26/2012	5:23:08 PM	SiCl4 MFC set to  0.000000
7/26/2012	5:23:08 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	5:23:08 PM	Tube furnace set to 0
7/26/2012	5:23:12 PM	Run finished at 5:23 PM
7/26/2012	5:23:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2012	5:23:25 PM	Recipe started at 5:23 PM
7/26/2012	5:23:25 PM	Helium valve closed
7/26/2012	5:23:25 PM	H2 valve closed
7/26/2012	5:23:25 PM	BCl3 valve closed
7/26/2012	5:23:25 PM	PH3 valve closed
7/26/2012	5:23:25 PM	SiCl4 pre valve closed
7/26/2012	5:23:25 PM	SiCl4 post valve closed
7/26/2012	5:23:25 PM	Main Vac valve closed
7/26/2012	5:23:25 PM	Bypass valve closed
7/26/2012	5:23:25 PM	Bubbler valve closed
7/26/2012	5:23:25 PM	Helium MFC set to  0.000000
7/26/2012	5:23:25 PM	H2 MFC set to  0.000000
7/26/2012	5:23:25 PM	BCl3 MFC set to  0.000000
7/26/2012	5:23:25 PM	PH3 MFC set to  0.000000
7/26/2012	5:23:25 PM	SiCl4 MFC set to  0.000000
7/26/2012	5:23:25 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	5:23:26 PM	Tube furnace set to 0
7/26/2012	5:23:29 PM	H2 valve closed
7/26/2012	5:23:29 PM	BCl3 valve closed
7/26/2012	5:23:29 PM	PH3 valve closed
7/26/2012	5:23:29 PM	SiCl4 pre valve closed
7/26/2012	5:23:29 PM	SiCl4 post valve closed
7/26/2012	5:23:29 PM	Main Vac valve closed
7/26/2012	5:23:29 PM	Bypass valve closed
7/26/2012	5:23:29 PM	Bubbler valve closed
7/26/2012	5:23:29 PM	Helium valve opened
7/26/2012	5:23:29 PM	Helium MFC set to  500.000000
7/26/2012	5:23:29 PM	H2 MFC set to  0.000000
7/26/2012	5:23:29 PM	BCl3 MFC set to  0.000000
7/26/2012	5:23:29 PM	PH3 MFC set to  0.000000
7/26/2012	5:23:29 PM	SiCl4 MFC set to  0.000000
7/26/2012	5:23:29 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	5:23:29 PM	Tube furnace set to 0
7/26/2012	5:24:39 PM	Helium valve closed
7/26/2012	5:24:39 PM	H2 valve closed
7/26/2012	5:24:39 PM	BCl3 valve closed
7/26/2012	5:24:39 PM	PH3 valve closed
7/26/2012	5:24:39 PM	SiCl4 pre valve closed
7/26/2012	5:24:39 PM	SiCl4 post valve closed
7/26/2012	5:24:39 PM	Main Vac valve closed
7/26/2012	5:24:39 PM	Bypass valve closed
7/26/2012	5:24:39 PM	Bubbler valve closed
7/26/2012	5:24:39 PM	Helium MFC set to  0.000000
7/26/2012	5:24:39 PM	H2 MFC set to  0.000000
7/26/2012	5:24:39 PM	BCl3 MFC set to  0.000000
7/26/2012	5:24:40 PM	PH3 MFC set to  0.000000
7/26/2012	5:24:40 PM	SiCl4 MFC set to  0.000000
7/26/2012	5:24:40 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	5:24:40 PM	Tube furnace set to 0
7/26/2012	5:24:41 PM	Run finished at 5:24 PM
7/26/2012	5:24:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2012	5:28:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2012	5:28:27 PM	Recipe started at 5:28 PM
7/26/2012	5:28:27 PM	Helium valve closed
7/26/2012	5:28:27 PM	H2 valve closed
7/26/2012	5:28:27 PM	BCl3 valve closed
7/26/2012	5:28:27 PM	PH3 valve closed
7/26/2012	5:28:27 PM	SiCl4 pre valve closed
7/26/2012	5:28:27 PM	SiCl4 post valve closed
7/26/2012	5:28:27 PM	Main Vac valve closed
7/26/2012	5:28:27 PM	Bubbler valve closed
7/26/2012	5:28:27 PM	Bypass valve opened
7/26/2012	5:28:27 PM	Helium MFC set to  0.000000
7/26/2012	5:28:27 PM	H2 MFC set to  0.000000
7/26/2012	5:28:27 PM	BCl3 MFC set to  0.000000
7/26/2012	5:28:27 PM	PH3 MFC set to  0.000000
7/26/2012	5:28:27 PM	SiCl4 MFC set to  0.000000
7/26/2012	5:28:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	5:28:27 PM	Tube furnace set to 0
7/26/2012	5:29:41 PM	Helium valve closed
7/26/2012	5:29:41 PM	H2 valve closed
7/26/2012	5:29:41 PM	BCl3 valve closed
7/26/2012	5:29:41 PM	PH3 valve closed
7/26/2012	5:29:41 PM	SiCl4 pre valve closed
7/26/2012	5:29:41 PM	SiCl4 post valve closed
7/26/2012	5:29:41 PM	Main Vac valve closed
7/26/2012	5:29:41 PM	Bubbler valve closed
7/26/2012	5:29:41 PM	Bypass valve opened
7/26/2012	5:29:41 PM	Helium MFC set to  0.000000
7/26/2012	5:29:41 PM	H2 MFC set to  0.000000
7/26/2012	5:29:41 PM	BCl3 MFC set to  0.000000
7/26/2012	5:29:41 PM	PH3 MFC set to  0.000000
7/26/2012	5:29:41 PM	SiCl4 MFC set to  0.000000
7/26/2012	5:29:41 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	5:29:41 PM	Tube furnace set to 0
7/26/2012	5:30:41 PM	Helium valve closed
7/26/2012	5:30:41 PM	H2 valve closed
7/26/2012	5:30:41 PM	BCl3 valve closed
7/26/2012	5:30:41 PM	PH3 valve closed
7/26/2012	5:30:41 PM	SiCl4 pre valve closed
7/26/2012	5:30:41 PM	SiCl4 post valve closed
7/26/2012	5:30:41 PM	Bypass valve closed
7/26/2012	5:30:41 PM	Bubbler valve closed
7/26/2012	5:30:41 PM	Main Vac valve opened
7/26/2012	5:30:41 PM	Helium MFC set to  0.000000
7/26/2012	5:30:41 PM	H2 MFC set to  0.000000
7/26/2012	5:30:41 PM	BCl3 MFC set to  0.000000
7/26/2012	5:30:41 PM	PH3 MFC set to  0.000000
7/26/2012	5:30:41 PM	SiCl4 MFC set to  0.000000
7/26/2012	5:30:41 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	5:30:41 PM	Tube furnace set to 0
7/26/2012	5:30:42 PM	Run finished at 5:30 PM
7/26/2012	5:30:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2012	5:30:59 PM	Recipe started at 5:30 PM
7/26/2012	5:30:59 PM	Helium valve closed
7/26/2012	5:30:59 PM	H2 valve closed
7/26/2012	5:30:59 PM	BCl3 valve closed
7/26/2012	5:30:59 PM	PH3 valve closed
7/26/2012	5:30:59 PM	SiCl4 pre valve closed
7/26/2012	5:30:59 PM	SiCl4 post valve closed
7/26/2012	5:30:59 PM	Bypass valve closed
7/26/2012	5:30:59 PM	Bubbler valve closed
7/26/2012	5:30:59 PM	Main Vac valve opened
7/26/2012	5:30:59 PM	Helium MFC set to  0.000000
7/26/2012	5:30:59 PM	H2 MFC set to  0.000000
7/26/2012	5:30:59 PM	BCl3 MFC set to  0.000000
7/26/2012	5:30:59 PM	PH3 MFC set to  0.000000
7/26/2012	5:30:59 PM	SiCl4 MFC set to  0.000000
7/26/2012	5:30:59 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	5:30:59 PM	Tube furnace set to 0
7/26/2012	8:30:59 PM	Helium valve closed
7/26/2012	8:30:59 PM	H2 valve closed
7/26/2012	8:30:59 PM	BCl3 valve closed
7/26/2012	8:30:59 PM	PH3 valve closed
7/26/2012	8:30:59 PM	SiCl4 pre valve closed
7/26/2012	8:30:59 PM	SiCl4 post valve closed
7/26/2012	8:30:59 PM	Main Vac valve closed
7/26/2012	8:30:59 PM	Bypass valve closed
7/26/2012	8:30:59 PM	Bubbler valve closed
7/26/2012	8:30:59 PM	Helium MFC set to  0.000000
7/26/2012	8:30:59 PM	H2 MFC set to  0.000000
7/26/2012	8:30:59 PM	BCl3 MFC set to  0.000000
7/26/2012	8:30:59 PM	PH3 MFC set to  0.000000
7/26/2012	8:30:59 PM	SiCl4 MFC set to  0.000000
7/26/2012	8:30:59 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	8:30:59 PM	Tube furnace set to 0
7/26/2012	8:31:02 PM	Helium valve closed
7/26/2012	8:31:02 PM	BCl3 valve closed
7/26/2012	8:31:02 PM	PH3 valve closed
7/26/2012	8:31:02 PM	SiCl4 pre valve closed
7/26/2012	8:31:02 PM	SiCl4 post valve closed
7/26/2012	8:31:02 PM	Main Vac valve closed
7/26/2012	8:31:02 PM	Bypass valve closed
7/26/2012	8:31:02 PM	Bubbler valve closed
7/26/2012	8:31:02 PM	H2 valve opened
7/26/2012	8:31:02 PM	Helium MFC set to  0.000000
7/26/2012	8:31:02 PM	H2 MFC set to  500.000000
7/26/2012	8:31:02 PM	BCl3 MFC set to  0.000000
7/26/2012	8:31:02 PM	PH3 MFC set to  0.000000
7/26/2012	8:31:02 PM	SiCl4 MFC set to  0.000000
7/26/2012	8:31:02 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	8:31:02 PM	Tube furnace set to 0
7/26/2012	8:32:18 PM	Helium valve closed
7/26/2012	8:32:18 PM	BCl3 valve closed
7/26/2012	8:32:18 PM	PH3 valve closed
7/26/2012	8:32:18 PM	SiCl4 pre valve closed
7/26/2012	8:32:18 PM	SiCl4 post valve closed
7/26/2012	8:32:18 PM	Main Vac valve closed
7/26/2012	8:32:18 PM	Bypass valve closed
7/26/2012	8:32:18 PM	H2 valve opened
7/26/2012	8:32:18 PM	Bubbler valve opened
7/26/2012	8:32:18 PM	Helium MFC set to  0.000000
7/26/2012	8:32:18 PM	H2 MFC set to  500.000000
7/26/2012	8:32:18 PM	BCl3 MFC set to  0.000000
7/26/2012	8:32:18 PM	PH3 MFC set to  0.000000
7/26/2012	8:32:18 PM	SiCl4 MFC set to  0.000000
7/26/2012	8:32:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	8:32:18 PM	Tube furnace set to 0
7/26/2012	8:32:19 PM	Helium valve closed
7/26/2012	8:32:19 PM	BCl3 valve closed
7/26/2012	8:32:19 PM	PH3 valve closed
7/26/2012	8:32:19 PM	SiCl4 pre valve closed
7/26/2012	8:32:19 PM	SiCl4 post valve closed
7/26/2012	8:32:19 PM	Main Vac valve closed
7/26/2012	8:32:19 PM	Bypass valve closed
7/26/2012	8:32:19 PM	H2 valve opened
7/26/2012	8:32:19 PM	Bubbler valve opened
7/26/2012	8:32:19 PM	Helium MFC set to  0.000000
7/26/2012	8:32:19 PM	H2 MFC set to  500.000000
7/26/2012	8:32:19 PM	BCl3 MFC set to  0.000000
7/26/2012	8:32:19 PM	PH3 MFC set to  0.000000
7/26/2012	8:32:19 PM	SiCl4 MFC set to  0.000000
7/26/2012	8:32:19 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	8:32:19 PM	Tube furnace set to 1000
7/26/2012	8:57:19 PM	Helium valve closed
7/26/2012	8:57:19 PM	PH3 valve closed
7/26/2012	8:57:19 PM	Main Vac valve closed
7/26/2012	8:57:19 PM	Bypass valve closed
7/26/2012	8:57:19 PM	H2 valve opened
7/26/2012	8:57:19 PM	BCl3 valve opened
7/26/2012	8:57:19 PM	SiCl4 pre valve opened
7/26/2012	8:57:19 PM	SiCl4 post valve opened
7/26/2012	8:57:19 PM	Bubbler valve opened
7/26/2012	8:57:19 PM	Helium MFC set to  0.000000
7/26/2012	8:57:19 PM	H2 MFC set to  450.000000
7/26/2012	8:57:19 PM	BCl3 MFC set to  1.000000
7/26/2012	8:57:19 PM	PH3 MFC set to  0.000000
7/26/2012	8:57:19 PM	SiCl4 MFC set to  50.000000
7/26/2012	8:57:19 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	8:57:20 PM	Tube furnace set to 1000
7/26/2012	9:28:50 PM	Helium valve closed
7/26/2012	9:28:50 PM	BCl3 valve closed
7/26/2012	9:28:50 PM	Main Vac valve closed
7/26/2012	9:28:50 PM	Bypass valve closed
7/26/2012	9:28:50 PM	H2 valve opened
7/26/2012	9:28:50 PM	PH3 valve opened
7/26/2012	9:28:50 PM	SiCl4 pre valve opened
7/26/2012	9:28:50 PM	SiCl4 post valve opened
7/26/2012	9:28:50 PM	Bubbler valve opened
7/26/2012	9:28:50 PM	Helium MFC set to  0.000000
7/26/2012	9:28:50 PM	H2 MFC set to  430.000000
7/26/2012	9:28:50 PM	BCl3 MFC set to  0.000000
7/26/2012	9:28:50 PM	PH3 MFC set to  20.000000
7/26/2012	9:28:50 PM	SiCl4 MFC set to  50.000000
7/26/2012	9:28:50 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:28:50 PM	Tube furnace set to 1000
7/26/2012	9:30:20 PM	Helium valve closed
7/26/2012	9:30:20 PM	BCl3 valve closed
7/26/2012	9:30:20 PM	PH3 valve closed
7/26/2012	9:30:20 PM	SiCl4 pre valve closed
7/26/2012	9:30:20 PM	SiCl4 post valve closed
7/26/2012	9:30:20 PM	Main Vac valve closed
7/26/2012	9:30:20 PM	Bypass valve closed
7/26/2012	9:30:20 PM	H2 valve opened
7/26/2012	9:30:20 PM	Bubbler valve opened
7/26/2012	9:30:20 PM	Helium MFC set to  0.000000
7/26/2012	9:30:20 PM	H2 MFC set to  500.000000
7/26/2012	9:30:20 PM	BCl3 MFC set to  0.000000
7/26/2012	9:30:20 PM	PH3 MFC set to  0.000000
7/26/2012	9:30:20 PM	SiCl4 MFC set to  0.000000
7/26/2012	9:30:20 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:30:20 PM	Tube furnace set to 750
7/26/2012	9:45:20 PM	H2 valve closed
7/26/2012	9:45:20 PM	BCl3 valve closed
7/26/2012	9:45:20 PM	PH3 valve closed
7/26/2012	9:45:20 PM	SiCl4 pre valve closed
7/26/2012	9:45:20 PM	SiCl4 post valve closed
7/26/2012	9:45:20 PM	Main Vac valve closed
7/26/2012	9:45:20 PM	Bypass valve closed
7/26/2012	9:45:20 PM	Helium valve opened
7/26/2012	9:45:20 PM	Bubbler valve opened
7/26/2012	9:45:20 PM	Helium MFC set to  500.000000
7/26/2012	9:45:20 PM	H2 MFC set to  0.000000
7/26/2012	9:45:20 PM	BCl3 MFC set to  0.000000
7/26/2012	9:45:20 PM	PH3 MFC set to  0.000000
7/26/2012	9:45:20 PM	SiCl4 MFC set to  0.000000
7/26/2012	9:45:20 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	9:45:20 PM	Tube furnace set to 0
7/26/2012	10:05:20 PM	Helium valve closed
7/26/2012	10:05:20 PM	H2 valve closed
7/26/2012	10:05:20 PM	BCl3 valve closed
7/26/2012	10:05:20 PM	PH3 valve closed
7/26/2012	10:05:20 PM	SiCl4 pre valve closed
7/26/2012	10:05:20 PM	SiCl4 post valve closed
7/26/2012	10:05:20 PM	Main Vac valve closed
7/26/2012	10:05:20 PM	Bypass valve closed
7/26/2012	10:05:20 PM	Bubbler valve closed
7/26/2012	10:05:20 PM	Helium MFC set to  0.000000
7/26/2012	10:05:20 PM	H2 MFC set to  0.000000
7/26/2012	10:05:20 PM	BCl3 MFC set to  0.000000
7/26/2012	10:05:20 PM	PH3 MFC set to  0.000000
7/26/2012	10:05:20 PM	SiCl4 MFC set to  0.000000
7/26/2012	10:05:20 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	10:05:20 PM	Tube furnace set to 0
7/26/2012	10:25:20 PM	Helium valve closed
7/26/2012	10:25:20 PM	H2 valve closed
7/26/2012	10:25:20 PM	BCl3 valve closed
7/26/2012	10:25:20 PM	PH3 valve closed
7/26/2012	10:25:20 PM	SiCl4 pre valve closed
7/26/2012	10:25:20 PM	SiCl4 post valve closed
7/26/2012	10:25:20 PM	Main Vac valve closed
7/26/2012	10:25:20 PM	Bubbler valve closed
7/26/2012	10:25:20 PM	Bypass valve opened
7/26/2012	10:25:20 PM	Helium MFC set to  0.000000
7/26/2012	10:25:20 PM	H2 MFC set to  0.000000
7/26/2012	10:25:20 PM	BCl3 MFC set to  0.000000
7/26/2012	10:25:20 PM	PH3 MFC set to  0.000000
7/26/2012	10:25:20 PM	SiCl4 MFC set to  0.000000
7/26/2012	10:25:20 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	10:25:20 PM	Tube furnace set to 0
7/26/2012	10:26:15 PM	Helium valve closed
7/26/2012	10:26:15 PM	H2 valve closed
7/26/2012	10:26:15 PM	BCl3 valve closed
7/26/2012	10:26:15 PM	PH3 valve closed
7/26/2012	10:26:15 PM	SiCl4 pre valve closed
7/26/2012	10:26:15 PM	SiCl4 post valve closed
7/26/2012	10:26:15 PM	Main Vac valve closed
7/26/2012	10:26:15 PM	Bubbler valve closed
7/26/2012	10:26:15 PM	Bypass valve opened
7/26/2012	10:26:15 PM	Helium MFC set to  0.000000
7/26/2012	10:26:15 PM	H2 MFC set to  0.000000
7/26/2012	10:26:15 PM	BCl3 MFC set to  0.000000
7/26/2012	10:26:15 PM	PH3 MFC set to  0.000000
7/26/2012	10:26:15 PM	SiCl4 MFC set to  0.000000
7/26/2012	10:26:15 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	10:26:15 PM	Tube furnace set to 0
7/26/2012	10:27:15 PM	Helium valve closed
7/26/2012	10:27:15 PM	H2 valve closed
7/26/2012	10:27:15 PM	BCl3 valve closed
7/26/2012	10:27:15 PM	PH3 valve closed
7/26/2012	10:27:15 PM	SiCl4 pre valve closed
7/26/2012	10:27:15 PM	SiCl4 post valve closed
7/26/2012	10:27:15 PM	Bypass valve closed
7/26/2012	10:27:15 PM	Bubbler valve closed
7/26/2012	10:27:15 PM	Main Vac valve opened
7/26/2012	10:27:15 PM	Helium MFC set to  0.000000
7/26/2012	10:27:15 PM	H2 MFC set to  0.000000
7/26/2012	10:27:15 PM	BCl3 MFC set to  0.000000
7/26/2012	10:27:15 PM	PH3 MFC set to  0.000000
7/26/2012	10:27:15 PM	SiCl4 MFC set to  0.000000
7/26/2012	10:27:15 PM	Bypass solenoid MFC set to  0.000000
7/26/2012	10:27:15 PM	Tube furnace set to 0
7/26/2012	11:27:15 PM	Run finished at 11:27 PM
